Sputter Target

Sputter Target

Sputter Target

Sputter Target

SINCE 2002

Research & Innovation

SWI provides a wide range of sputter target including Metal , Alloy , Rare earth , Single crystal , Compound , and various ceramic target , such as Oxide , Nitride , Carbide , Boride , Sulfide , Selenide and Telluride sputter target .We provide a complete line of sputtering target materials suitable for Pulsed Laser Deposition ( PLD ) systems and DC or RF Magnetron Sputtering Systems , These targets can be fabricated to fit all sputtering systems including round , rectangular , S-Gun , Delta , and Ring . Sputter target can be fabricated in round or square shape , with back plate or without back plate depands on the sputtering system and target material you have , our standard size from 1" to 12 " in diameter , thickness range from 1 mm , 3 mm to 6 mm , in single or multiple-piece construction . In addition , we can offer custom specifications designed to your unique needs including , dimension , thickness , purity , density , uniform grain size , composition rate , and different back plate . We have various sputter targets in stock and can machine to your specification with good quality . Contact us for more information .

Manufacture Method Application field        
Vacuum hot pressing Semiconductor
Hot isostatic pressing Data storage
Cold isostatic pressing Optoelectronics
Vacuum sintering Flat panel display
Vacuum arc melting Solar cell

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Product Specification

Purity         99.9% / 99.99% / 99.999%
Diameter Ø 1" / Ø 2" / Ø 3" / Ø 4"/ Ø 6" / Ø 8"
Thickness 3 mm ~ 6 mm
Back plate OFHC copper
Bonding Indium / Ag epoxy
Package Vacuum sealed

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Target Selection

We can customize your sputter target  !

Element Sputter Target

Al, Ag, B, Bi, C,
Co, Cr, Cu, Fe, Ge,
Hf, In, Mg, Mn, Mo,
Nb, Ni, Pb, Sb, Se,
Si, Sn, Ta, Te, Ti,
V, W, Y, Zn, Zr.

Rare Earth Sputter Target

Ce, Dy, Er, Gd, Ho,
La, Lu, Nd, Pr, Sm,
Tb, Yb, Eu .

Alloy Sputter Target

AlCr, AlCu, AlSi,
AlSiCu, AlTi, CoB,
CoCr, CoFe, CoFeB,
CoMnGe, CoMnSi,
CoNi, CoSi, CuAg,
CuIn, CuInGa,
CIGS, CuNi, CuSn,
CuZr, FeMn, FeV,
InSn, InZn, LaAl,
MnNi, NiAl, NiCr,
NiFe, NiTi, SiCu,
SiGe, TiAl, TiNi,
TiW, VW, WTi,
ZnAl, ZnIn, ZnNi,

Compound Sputter Target

SWI provides a wide range of compound sputter target including  Oxide , Nitride , Carbide , Boride , Fluoride , Silicide , Sulfide , Selenide and Telluride sputtering target .

1. Boride Sputter Target

CrB, FeB, HfB2, LaB6, MgB2, Mo2B5 ,NbB, SmB6, TaB, TiB2, WB, VB, VB2, ZrB2

2. Carbide Sputter Target

B4C, Cr3C2, HfC, Mo2C, NbC, SiC, TaC, TiC, TiCN, VC, WC, VC, ZrC

3. Fluoride Sputter Target

BaF2, CaF2, CeF3, FeF2, KF, LaF3, PbF2, MgF2, NaF

4. Nitride Sputter Target

AlN, BN, CrN, GaN, HfN, InN, NbN, Si3N4, TaN, TiN, VN, ZnN, ZrN, ZrCN

5. Oxide Sputter Target

Al2O3, ATO, AZO, BaTiO3, BSCCO, BST, CeO2, CuO, Cr2O3,Fe2O3, HfO2, In2O3, ITO, IZO, IZGO, IZTO, LaAl2O3, LaSrMnO3, LiNbO3, MgO, MoO3, NiO, Nb2O5, PbTiO3, PZT, Sb2O3, SiO, SiO2, SnO2, SrRuO3, SrTiO3, Ta2O5, TiO2, SnO2, V2O5, WO3, Y2O3, YBCO, YSZ, ZnO, ZAO, ZGO, ZIO, ZTO

6. Selenide Sputter Target

Al2Se3, Bi2Se3, CdSe, CuSe, Cu2Se, FeSe2, GeSe, In2Se3, MoSe2, MnSe, NbSe2, PbSe, Sb2Se3, SnSe, TaSe2, WSe2, ZnSe

7. Silicide Sputter Target

CoSi2, CrSi2, FeSi2, HfSi2, MoSi2, NbSi2, NiSi2, TaSi2, TiSi2, WSi2, VSi2, ZrSi2

8. Sulphide Sputter Target

CdS, CuS, Cu2S, FeS2, GaS, GeS, In2S3, PbS, MoS2, NiS, TiS2, Sb2S3, SnS, WS2, ZnS

9. Telluride Sputter Target

Al2Te3, Bi2Te3, CdTe, CuTe, GaTe, Ga2Te3, GeTe, PbTe, MnTe, MoTe2, NbTe2, TaTe2, SbTe, SnTe, WTe2, ZnTe