Borofloat Wafer




Borofloat Wafer




Borofloat Wafer




Borofloat Wafer






SINCE 2002

Research & Innovation


Semiconductor Wafer Inc. provides Borofloat glass wafer in diameter range from 1" to 12 " . Borofloat glass have many unique characteristics such as Low Thermal Expansion Coefficient which is suitable for anodic bonding to silicon application , Good thermal shock resistance , High resistance to acid / alkali , and High transmission . These special features makes Borofloat glass wafer as a top choice for many industry applications . Borofloat glass wafer can be fabricated in round or square shape , with a SEMI standard flat or Notch , one side polished or two sides polished , thickness range from 0.4 , 0.5 , 0.7 , 1.1 to 3 mm , ultrasonic cleaning and cleanroom compatible wafer cassette package are also available. In addition , we offer custom specifications designed to your unique needs including , dimension , SEMI. Standard flats , surface roughness , edge profile , thickness , flatness , surface quality , cleanliness package method . We have various glass substrates in stock and can machine to your specification with high precision surface finish . Contact us for further information .







Borofloat Wafer Properties


Chemical formula SiO2                                                                                                                                
Mechanical Properties  
Density 2.23 g / cm3
Poisson's ratio 0.14 ~ 0.17
Young's modulus 62.75 Gpa
Knoop Hardness 480
Thermal Properties  
Short-term operating temperature 500 °C
Long-term operating temperature 450 °C
Thermal conductivity ( 90 °C ) 1.2 W / (m. K)
Thermal expansion coefficient 3.25 ×10 -6 K-1
Electrical Properties  
Resistivity ( ohm-cm ) 8@250 °C / 6.5@350 °C
Loss Tangent 37 x 10-4
Dielectric constant e 4.6
Optical Properties  
Refractive index ( @ 589 nm ) Nd =1.472
Viscosity Properties  
Working point 1270 °C
Softening point 820 °C
Annealing point 560 °C
Strain point 518 °C
Chemical Properties  
Acid resistance class 1
Alkali resistance class 2
Hydrolytic resistance class 1
Composition  
SiO2 81%
B2O3 13%
Na2O / K2O 4%
Al2O3 2%

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Product Specification


Diameter               Ø 1" / Ø 2" / Ø 3" / Ø 4"/ Ø 6" / Ø 8"/ Ø 12"  
Square size 10 x 10 / 20 x 20 / 50 x 50 / 100 x 100 / 200 x 200 mm
Thickness 0.4 mm / 0.5 mm / 0.7 mm / 1.1 mm
Surface one side polished / two sides polished
Flat SEMI.Std. flat or Notch
TTV <= 15 um
Roughness Ra <=10 A
Surface quality 60 / 40
Package Ampak cassette / jar

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